Illumination lens for lighting system of scanner to manufacture e.g. memory chips, has optical component for guiding light to field, where lens is formed such that beam tufts are overlaid for coinciding edges of beam tufts in sections

摘要

The lens has an optical component for guiding illumination light to an object field (19) in a reticle plane (17). The lens divides an Extreme UV illuminating light radiation beam (3) into beam tufts (28A, 28B, 28C). The lens is formed such that the beam tufts are overlaid in an overlay plane (16), which is spaced apart from the reticle plane, for coinciding edges (32) of the overlaid beam tufts in sections. The tufts comprise beam tuft cross section areas (29A, 29B, 29C) at a location of the overlay plane, where the cross section areas are different from each other more than 10%. Independent claims are also included for the following: (1) a lighting system (2) a projection exposure system (3) a method for manufacturing a structured component.