SILICA FILM FILTER AND PROCESS FOR PRODUCING SILICA FILM FILTER

摘要

There is provided a silica membrane filter having performance of selectively separating an aromatic compound and performance of selectively separating an alcohol. The silica membrane filter is provided with a porous substrate and a silica membrane. The ratio of a He gas permeation amount to an N 2 gas permeation amount (He gas permeation amount / N 2 gas permeation amount) is 7 or less, and the ratio of the N 2 gas permeation amount to a SF 6 gas permeation amount (N 2 gas permeation amount / SF 6 gas permeation amount) is 1.5 or more.