发明名称 |
PIEZOELECTRIC ACTUATOR WITH COPLANAR ELECTRODES |
摘要 |
A piezoelectric actuator includes a cantilever membrane. A thin film sheet is affixed to one side of the cantilever membrane to bend the membrane in multiple directions in response to an electric field induced within the thin film sheet. A plurality of coplanar electrodes disposed on the thin film sheet are interdigitated in relation to one another to generate the electric field during application of a voltage across interdigitated electrodes. |
申请公布号 |
EP2589140(A1) |
申请公布日期 |
2013.05.08 |
申请号 |
EP20100854206 |
申请日期 |
2010.06.29 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
MARDILOVICH, PETER;KARLINSKI, HAGGAI;ULMER, KURT |
分类号 |
H01L41/047;B41J2/14;H01L41/09 |
主分类号 |
H01L41/047 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|