| 摘要 |
PURPOSE: An atmospheric pressure microwave plasma generator is provided to minimize power consumption and to generate plasma in atmospheric pressure with small power. CONSTITUTION: A lower conductor(120), a central conductor(130) and an upper conductor(110) form a strip line by being separated with a predetermined distance. A reflective plate(140) is arranged in one end of the strip line, short-circuits one end of the strip line and reflects microwave power reflected after generation of plasma. An SMA connector is connected to a hole formed in the lower conductor to supply microwave power. |
