发明名称 SUBSTRATE TRANSFERRING APPARATUS
摘要 <p>PURPOSE: A substrate transferring apparatus is provided to transfer a substrate by using a transfer roller connected to a shaft and to easily form a pattern in a substrate. CONSTITUTION: A transfer roller moves a substrate. A transfer shaft(120) receives driving force from the outside and rotates. A guide roller(130) prevents the separation of the substrate. A free roller(150) touches the lower surface of the substrate. The free roller supports the substrate.</p>
申请公布号 KR20130046499(A) 申请公布日期 2013.05.08
申请号 KR20110110931 申请日期 2011.10.28
申请人 SEMES CO., LTD. 发明人 JUNG, JEE YONG
分类号 H01L21/677;B65G49/06;G02F1/13 主分类号 H01L21/677
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