发明名称 DISPLAY MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING THE DISPLAY USING THE SAME
摘要 PURPOSE: A display manufacturing apparatus and a method for manufacturing a display using the same are provided to improve device reliability by performing an insulating layer patterning process using a laser. CONSTITUTION: A load lock chamber(210) supports a substrate. A stage(211) controls the position of the substrate. A laser module(212) is formed in the upper part of the stage. The laser module irradiates a laser. A gas supply part supplies an inert gas.
申请公布号 KR20130046542(A) 申请公布日期 2013.05.08
申请号 KR20110111001 申请日期 2011.10.28
申请人 JUSUNG ENGINEERING CO., LTD. 发明人 LEE, SUNG HUI;MIN, CHON KYU;YANG, JI BUM;LIM, SU MIN
分类号 H01L51/56;G02F1/13 主分类号 H01L51/56
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