DISPLAY MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING THE DISPLAY USING THE SAME
摘要
PURPOSE: A display manufacturing apparatus and a method for manufacturing a display using the same are provided to improve device reliability by performing an insulating layer patterning process using a laser. CONSTITUTION: A load lock chamber(210) supports a substrate. A stage(211) controls the position of the substrate. A laser module(212) is formed in the upper part of the stage. The laser module irradiates a laser. A gas supply part supplies an inert gas.
申请公布号
KR20130046542(A)
申请公布日期
2013.05.08
申请号
KR20110111001
申请日期
2011.10.28
申请人
JUSUNG ENGINEERING CO., LTD.
发明人
LEE, SUNG HUI;MIN, CHON KYU;YANG, JI BUM;LIM, SU MIN