发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING PRINTED WIRING BOARD |
摘要 |
PURPOSE: A photosensitive resin composition is provided to form a resist pattern with excellent resolution, density, flexibility, and resist shape. CONSTITUTION: A photosensitive resin composition comprises a binder polymer which has a structure unit derived from (meth)acrylic acids and a structure unit selected from modified dicyclopentenyl(meth)acrylate, modified dicyclopentanyl(meth)acrylate, modified isobornyl(meth)acrylate, modified admantyl(meth)acrylate, and modified cyclohexyl(meth)acrylate; a photopolymerizable compound, and a photopolymerization initiator. |
申请公布号 |
KR20130047656(A) |
申请公布日期 |
2013.05.08 |
申请号 |
KR20120120924 |
申请日期 |
2012.10.30 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
MURAMATSU YUKIKO;MIYASAKA MASAHIRO;OKADE SHOTA |
分类号 |
G03F7/028;G03F7/11;G03F7/26 |
主分类号 |
G03F7/028 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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