| 摘要 |
<p>PURPOSE: A mixed acid cleansing method of shower head electrodes are provided to effectively cleanse shower head electrodes. CONSTITUTION: A first cleansing volume is formed on a first plane of a shower head electrode by sealing a shower head electrode in a cleansing assembly and a second cleansing volume is formed on a second plane of a shower head electrode. The shower head electrode includes a plurality of gas passage ways extended from the first plane to the second plane. An acidic solution is loaded in the first cleansing volume on the first plane of the shower head electrode(226). The first cleansing volume on the on the first plane of the shower head electrode is pressurized and some of the acidic solution flows through more than one of the plurality of gas passage ways of the shower head electrode. A large amount of purified water is contacted with the second plane of the shower head electrode through the second cleansing volume on the second plane of the shower head electrode by being propelled(228). [Reference numerals] (222) Initial purge; (224,230,238) Air-drying; (226) Filling of acidic solution; (228) Forcible flow of acidic solution; (232,236) Rinsing of a first plane; (234) Rinsing of a second plane</p> |
