Method and apparatus for extensive optical three-dimensional measurement of surface topographies

摘要

The method involves determining a sharpest image point of an individual receiver as sharpness information on the basis of the individual receiver of an imaging system (1). The intersection of the surface and object-sided focal plane (z1 to zn) is determined and the three-dimensional position of the imaging system in relation to the object (P) is evaluated as position information together with the sharpness information for determining the measured surface topography of the object. An independent claim is included for an apparatus for the planar optical three-dimensional measurement of surface topography of an object by evaluation of sharpness information obtained from surface receiver of an imaging system.