A process for separating a template from a substrate during imprint lithography, and associated imprint lithography process

摘要

An orientation stage, for achieving fine movement and alignment of a template in an imprint lithography process, comprising a first flexure member (126) with first and second arms (172, 174) extending therefrom, each arm including a first set of flexure joints (160) which provide pivotal motion of said first flexure member about a first orientation axis (180). The orientation stage also comprises a second flexure member (128) having third and fourth arms (202, 204) extending therefrom, each arm including a second set of flexure joints (162) which provide pivotal motion of said second flexure member about a second orientation axis (200). Use of the orientation stage is also described.