| 摘要 |
PURPOSE: A sticking apparatus and a sticking method are provided to prevent the generation of voids between an object member and a sticking member. CONSTITUTION: An object member(20) is placed in a work stage(2). A sticking member(21) absorbs an absorption sheet(4). A pressure roller(7) upwardly presses the absorption sheet. A separation roller(8) delaminates the sticking member from the absorption sheet. The pressure roller pressurizes the starting end of the sticking member on the object member. The pressure roller and the separation roller move from one end of the absorption sheet to the other end to bond the object member to the sticking member. [Reference numerals] (10) Driving control unit; (12,11) Elevating control unit |
