ION BEAM EXTRACTION ELECTRODE AND ION SOURCE

摘要

PURPOSE: An ion beam extraction electrode and an ion source are provided to reduce leakage of an electric field coming from an ion extraction hole by contacting a transition unit with an adjacent ion extraction hole formation member. CONSTITUTION: An electrode frame(2) has an aperture in the center. At least one end of a plurality of ion extraction hole formation members(7) are movably supported. The plurality of ion extraction hole formation members have at least one first ion extraction hole formation member. The first ion extraction hole formation member has a body unit and a first transition unit(6). The first transition unit is extended from the body unit. The first transition unit contacts with a second ion extraction hole formation member. The second ion extraction hole formation member is adjacent to the first ion extraction hole formation member.