SUBSTRATE TREATING APPARATUS AND CHEMICAL RECYCLING METHOD

摘要

PURPOSE: A substrate processing apparatus and a chemical recycling method are provided to reduce chemical recycling costs in a substrate cleaning process. CONSTITUTION: A recycling unit includes a separating unit(30), a collecting line(700), a decompressing line(710), and a decompressing unit(40). The separating unit separates a mixture collected in a cleaning chamber. The collecting line connects the separating unit to the cleaning chamber. One side of the decompressing line is connected to the separating unit. The decompressing unit decompresses the separating unit.