METHOD OF PRODUCING A MEMS DEVICE

摘要

The clock has a cogwheel (10), a driver unit to sequentially gear with the cogwheel (10), and an actuator (20) to move the driver unit according to a hysterisis movement so that the driver unit gears with successive teeth of the wheel. The actuator (20) has two actuation modules that are simultaneously controlled to generate a combined hysteresis movement of the driver unit. The actuation module moves the driver unit in a direction with respect to the wheel (10) and the actuation module moves the driver unit in another direction with respect to the wheel (10).