发明名称 |
Cascaded-based de-embedding methodology |
摘要 |
An embodiment is a method for de-embedding. The method comprises forming a primary structure in a semiconductor chip and forming an auxiliary structure in the semiconductor chip. The auxiliary structure replicates a first portion of the primary structure. The method further comprises determining a transmission matrix for each of the primary structure and the auxiliary structure based on measurements and extracting a transmission matrix of a first component of the primary structure by determining a product of the transmission matrix of the primary structure and an inverse of the transmission matrix of the auxiliary structure. |
申请公布号 |
US8436626(B2) |
申请公布日期 |
2013.05.07 |
申请号 |
US20090640138 |
申请日期 |
2009.12.17 |
申请人 |
CHO HSIU-YING;TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD. |
发明人 |
CHO HSIU-YING |
分类号 |
G01R27/28 |
主分类号 |
G01R27/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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