发明名称 Cascaded-based de-embedding methodology
摘要 An embodiment is a method for de-embedding. The method comprises forming a primary structure in a semiconductor chip and forming an auxiliary structure in the semiconductor chip. The auxiliary structure replicates a first portion of the primary structure. The method further comprises determining a transmission matrix for each of the primary structure and the auxiliary structure based on measurements and extracting a transmission matrix of a first component of the primary structure by determining a product of the transmission matrix of the primary structure and an inverse of the transmission matrix of the auxiliary structure.
申请公布号 US8436626(B2) 申请公布日期 2013.05.07
申请号 US20090640138 申请日期 2009.12.17
申请人 CHO HSIU-YING;TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD. 发明人 CHO HSIU-YING
分类号 G01R27/28 主分类号 G01R27/28
代理机构 代理人
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