发明名称 SHIELD FLATNESS REPAIR DEVICE
摘要 PURPOSE: A shield flatness repair device is provided to easily correct the flatness of a distorted shield and to improve manufacture yield. CONSTITUTION: A frame comprises a subframe(230), a lateral frame(220), and an upper frame(210). The subframe fixes and supports a shield(1000). The lateral frame is vertically combined with the subframe. The upper frame is combined with the upper part of the lateral frame. A pressure device is combined with the upper frame and supplies the pressure for the shield. A press block is combined with the pressure device and transfers the pressure to the shield. A fixing unit fixes the shield to the subframe.
申请公布号 KR20130046087(A) 申请公布日期 2013.05.07
申请号 KR20110110442 申请日期 2011.10.27
申请人 ZENITHWORLD CO., LTD. 发明人 NAM, BAE SONG;KIM, DO HYOUNG
分类号 H01L21/205 主分类号 H01L21/205
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