MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for fabricating an LCD array substrate is provided to minimize the content of peracetic acid by using etchant composition, and to prevent the overheat of chain decomposition reaction due to exclusion of hydrogen peroxide. CONSTITUTION: A gate electrode is formed on a substrate. A gate insulating layer is formed on the substrate. A semiconductor layer is formed on the gate insulating layer. A source/drain electrode is formed on the semiconductor layer. A pixel electrode connected to the drain electrode is formed. An etchant composition includes peracetic acid 0.5-5 %, a fluorine-containing compound 0.01-2 %, and water. The electrode is formed by using the etchant composition.