| 摘要 |
PURPOSE: A quartz tube in a plasma etching device and its cooling system are provided to enhance the adhesion between the quartz tube and a copper cooling coil, and to improve cooling efficiency. CONSTITUTION: An upper module(113) and a lower module(114) have spiral rails. A copper cooling coil(112) integrally connects the upper module and the lower module. A quartz tube(111) has a spiral structure in the connection part of the upper and the lower surface. The quartz tube is combined with the screws of a lower head and an upper head, and penetrates the copper cooling coil. An upper module external screw fixing unit(119) is connected to the upper module and an external fixing frame by using a screw. A lower module external screw fixing unit(115) is connected to the lower module and the lower module external screw fixing unit of the external fixing frame by using three screws. [Reference numerals] (111) Quartz tube; (112) Copper cooling coil; (113) Upper module; (114) Lower module; (115) Lower module external screw fixing unit; (116) Spiral rail; (117) External fixing frame; (118) Lower module external screw coupling unit; (119) Upper module external screw fixing unit
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