Diffusion process and apparatus,申请号US19620167815-传众专利搜索

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发明名称	Diffusion process and apparatus
摘要
申请公布号	US3183130(A)	申请公布日期	1965.05.11
申请号	US19620167815	申请日期	1962.01.22
申请人	MOTOROLA, INC.	发明人	REYNOLDS JAMES E.;HOLLOWAY KENNETH D.
分类号	C30B31/02;C30B31/14;H01L21/225	主分类号	C30B31/02
代理机构		代理人
主权项
地址

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