发明名称 METHOD OF MANUFACTURING CYLINDRICAL PIEZOELECTRIC ELEMENT, CYLINDRICAL PIEZOELECTRIC ELEMENT, AND MICRO DRIVE MECHANISM
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a cylindrical piezoelectric element, and a cylindrical piezoelectric element which implement a compact size without requiring higher machining difficulty. <P>SOLUTION: The cylindrical piezoelectric element manufacturing method includes: forming a reference electrode 5-21 on an inner circumferential surface of a cylindrical piezoelectric material; forming a plurality of driving electrodes 5-1, 5-2 circumferentially having a predetermined width and axially extending from one end to the other end on an outer circumferential surface of the cylindrical piezoelectric material; forming a polarizing electrode 5-11 axially in series with and in electrical conduction with the plurality of driving electrodes 5-1, 5-2 in a region of the outer circumferential surface of the cylindrical piezoelectric material near the one axial end of the cylindrical piezoelectric material; applying a predetermined voltage between the polarizing electrode 5-11 and the reference electrode 5-21 to polarize regions of the cylindrical piezoelectric material corresponding to the plurality of driving electrodes 5-1, 5-2; and removing the polarizing electrode 5-11 of the cylindrical piezoelectric material. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013080774(A) 申请公布日期 2013.05.02
申请号 JP20110219148 申请日期 2011.10.03
申请人 OLYMPUS CORP 发明人 SAKAI CHOEI
分类号 H01L41/22;G02B26/10;H01L41/09;H01L41/187;H01L41/257 主分类号 H01L41/22
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