MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATION PIECE, MANUFACTURING APPARATUS OF PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND ATOMIC CLOCK

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric vibration piece which suppresses the temperature rise during the deposition of an insulation film and suppresses metal diffusion of an electrode, and to provide a piezoelectric vibrator, an oscillator, an electronic apparatus, and an atomic clock which include the piezoelectric vibration piece manufactured in this method.

SOLUTION: A passivation film deposition process is carried out using a sputtering apparatus 70 including a target 77 and a rotation drum 71 that may rotate. The passivation film deposition process includes: wafer attachment process where a wafer W is attached to an outer peripheral surface 71a of the rotation drum 71; and a rotation deposition process where the rotation drum 71 is rotated so that the wafer W passes a position facing the target 77 to deposit the passivation film. The rotation deposition process is characterized in that the rotation drum 71 is rotated so that the wafer W passes the position facing the target 77 multiple times thereby depositing the passivation film.

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