发明名称 |
THIN FILM TRANSISTOR, DISPLAY DEVICE AND ELECTRONIC EQUIPMENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film transistor efficiently supplying oxygen to an oxide semiconductor layer, thereby capable of improving transistor characteristics, and a display device and electronic equipment which include the thin film transistor. <P>SOLUTION: A thin film transistor of the present technique includes: a gate electrode provided on a substrate; an oxide semiconductor layer having a channel region at a position corresponding to the gate electrode; a channel protective film covering the channel region; a source electrode and a drain electrode provided on the oxide semiconductor layer on both sides of the channel protective film; a protective film provided at least on the source electrode and the drain electrode; and one or two or more recessed parts provided in the oxide semiconductor layer and filled with a constituent material which is the same as that of the protective film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013080769(A) |
申请公布日期 |
2013.05.02 |
申请号 |
JP20110219055 |
申请日期 |
2011.10.03 |
申请人 |
SONY CORP |
发明人 |
FUKUMOTO ERI;TERAI YASUHIRO;TOKUNAGA KAZUHIKO;OSHIMA YOSHIHIRO |
分类号 |
H01L29/786;G02F1/1368;H01L21/336;H01L51/50 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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