发明名称 |
SUBSTRATE TREATING APPARATUS AND CHEMICAL RECYCLING METHOD |
摘要 |
Provided is a substrate treating apparatus. The substrate treating apparatus according to embodiments of the present invention may include a cleaning chamber cleaning foreign objects on a substrate, and a recycling unit recycling by recovering a mixed solution including a first chemical and a second chemical used in cleaning of the substrate, wherein the recycling unit includes a separation unit separating the mixed solution recovered from the cleaning chamber, a recovery line connecting the separation unit and the cleaning chamber and allowing the mixed solution to flow into the separation unit, a decompression line having one end connected to the separation unit and exhausting the mixed solution evaporated from the separation unit, and a decompression unit installed in the decompression line and reducing pressure in the separation unit.
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申请公布号 |
US2013104943(A1) |
申请公布日期 |
2013.05.02 |
申请号 |
US201213664844 |
申请日期 |
2012.10.31 |
申请人 |
SEMES CO., LTD.;SEMES CO., LTD. |
发明人 |
RYU JAERYUNG;HWANG DONG SOON;KANG BYUNG CHUL |
分类号 |
B08B3/08;B01D3/10;B08B3/10 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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