INSPECTION APPARATUS, PROCESSING APPARATUS, INFORMATION PROCESSING APPARATUS, OBJECT MANUFACTURING APPARATUS, AND MANUFACTURING METHOD FOR AN OBJECT

摘要

An inspection apparatus includes a detector, a transmitter, and a receiver. The detector is configured to detect whether or not an object processed by a processing apparatus has a defect. The transmitter is configured to send defect information regarding the defect detected by the detector to the processing apparatus. The receiver is configured to receive, when the processing apparatus performs solving processing based on solving measure information corresponding to the defect information and sends content information regarding contents of the solving processing, the sent content information.