PLASMA-RESISTANT ELEMENT AND METHOD FOR MANUFACTURING PLASMA-RESISTANT ELEMENT

摘要

A plasma-resistant element can be comprised of a sintered body containing yttrium oxide and nanocarbon having an average particle size of approximately 1 nm to 200 nm. The plasma-resistant element is obtained by forming a liquid mixture by mixing yttrium oxide powder and nanocarbon powder having the average particle size of approximately 1 nm to 200 nm with a solvent, forming the liquid mixture into a spherical powder mixture by using a spray dryer, and by forming the sintered body from the spherical powder mixture by hot pressing.