摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical waveguide element which has an electrooptical effect and uses a thin plate with a thickness of 10 μm or less that removes slab propagation light reflected on the end face of the element and suppresses the deterioration of operation characteristics. <P>SOLUTION: In an optical waveguide element which has an electrooptical effect, and has a thin plate that has a thickness of 10 μm or less and has an optical waveguide formed therein, and a reinforcing substrate adhered onto the thin plate through an adhesive layer, an antireflection film is formed on a part of the side faces of the optical waveguide element. <P>COPYRIGHT: (C)2013,JPO&INPIT |