| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid injection head with a piezoelectric element having a small environmental load and a large strain amount, a manufacturing method of a liquid injection device, and a manufacturing method of the piezoelectric element. <P>SOLUTION: A manufacturing method of a liquid injection head comprises the steps of: forming a substrate 110, an elastic film 50, an adhesion layer 56, and an electrode 60; forming a coating film above the electrode 60 by applying a precursor solution containing bismuth, iron, barium, and titanium; drying the coating film at an actual temperature of 165°C or higher and 185°C or lower by heating; degreasing the coating film at an actual temperature of 330°C or higher and 440°C or lower by heating after the drying step; and forming a piezoelectric film 72 by crystallizing the degreased coating film by heating after the degreasing step. This forms a piezoelectric layer 70 of a prescribed thickness. <P>COPYRIGHT: (C)2013,JPO&INPIT |
