| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of adjusting the optical axis easily even if the state of a charged particle beam changes, and to provide an adjustment method of a charged particle beam device. <P>SOLUTION: A charged particle beam device including an alignment deflector performing axis adjustment for an optical element is further provided with means for changing the conditions of the optical element to at least two states, means for detecting misalignment between patterns in two images obtained when the conditions of the alignment deflector are changed to at least two states, and the conditions of the optical element are changed by setting means according to respective alignment deflection conditions, and means for adjusting the alignment deflector on the basis of the relationship between at least two misalignments and the deflection conditions of the alignment deflector. <P>COPYRIGHT: (C)2013,JPO&INPIT |
