摘要 |
A Field Effect Transistor (FET) semiconductor device comprising at least one nanostructure, comprises at least a uniformly doped beam-shaped nanostructure having two major surfaces, a gate electrode provided at either major surface of the nanostructure, and an insulating layer between each of the major surfaces of the nanostructure and the gate electrodes to form a double gate nanostructure pinch-off FET. It is an advantage of such FET that pinch-off voltage and current of the FET can be independently tuned. |