发明名称 DIFFUSING AGENT COMPOSITION AND METHOD OF FORMING IMPURITY DIFFUSION LAYER
摘要 Provided is a diffusing agent composition used for the printing of a dopant component on a semiconductor substrate, the diffusing agent composition including a silicon compound (A), a dopant component (B), and a non-dopant metal component (C). Among these components, the content of Na contained as the non-dopant metal component (C) is less than 60 ppb relative to the total amount of the composition.
申请公布号 US2013109123(A1) 申请公布日期 2013.05.02
申请号 US201113808371 申请日期 2011.07.06
申请人 MORITA TOSHIRO;KAMIZONO TAKASHI;MIYAGI TADASHI;TOKYO OHKA KOGYO CO., LTD. 发明人 MORITA TOSHIRO;KAMIZONO TAKASHI;MIYAGI TADASHI
分类号 H01L31/18 主分类号 H01L31/18
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