| 发明名称 |
MEMS Microphone with Spring Suspended Backplate |
| 摘要 |
A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.
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| 申请公布号 |
US2013108084(A1) |
申请公布日期 |
2013.05.02 |
| 申请号 |
US201213719466 |
申请日期 |
2012.12.19 |
| 申请人 |
ANALOG DEVICES, INC.;ANALOG DEVICES, INC. |
发明人 |
ZHANG XIN |
| 分类号 |
H04R19/04;H04R31/00 |
主分类号 |
H04R19/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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