发明名称 SEMICONDUCTOR DEVICE
摘要 A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation (STI) on the substrate of the resistor region; forming a tank in the STI of the resistor region; and forming a resistor in the tank and on the surface of the STI adjacent to two sides of the tank.
申请公布号 US2013105912(A1) 申请公布日期 2013.05.02
申请号 US201113283603 申请日期 2011.10.28
申请人 HSU CHUN-WEI;HUANG PO-CHENG;HUANG REN-PENG;YANG JIE-NING;HSU CHIA-LIN;TSAI TENG-CHUN;LIN CHIH-HSUN;KUNG CHANG-HUNG;CHEN YEN-MING;LI YU-TING 发明人 HSU CHUN-WEI;HUANG PO-CHENG;HUANG REN-PENG;YANG JIE-NING;HSU CHIA-LIN;TSAI TENG-CHUN;LIN CHIH-HSUN;KUNG CHANG-HUNG;CHEN YEN-MING;LI YU-TING
分类号 H01L27/06;H01L21/8234 主分类号 H01L27/06
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