发明名称 White beam slit
摘要 A white beam slit. The embodiment of this unit consists of vertical and horizontal slit mechanisms, a vacuum vessel which houses them, stepper motors, limit switches, electrical connections for a drain current measurement system and a stand for the vacuum chamber to attach to. For the base design, the fully scanable aperture can be up to 35 mm square with a maximum aperture of 50 mm square. For custom designs, the aperture can be significantly larger. A cooling assembly is incorporated within to maintain temperature of moveable slit components.
申请公布号 US2013105704(A1) 申请公布日期 2013.05.02
申请号 US201113373029 申请日期 2011.11.02
申请人 DEYHIM ALEX;EVERY ERIC VAN 发明人 DEYHIM ALEX;EVERY ERIC VAN
分类号 H01J3/14 主分类号 H01J3/14
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