QUANTUM CASCADE LASER MANUFACTURING METHOD

摘要

This quantum cascade laser manufacturing method comprises: a step in which a resin stamper (201) having a second groove pattern (P2) is produced by pressing a mother stamper against a flexible resin film; a step in which a wafer in which an active layer is formed on a semiconductor substrate is produced; a step in which a resist film (304) is formed on the active-layer-side surface of the wafer; a step in which a third groove pattern (P3) is formed on the resist film (304) by pressing the resin stamper against the resist film (304) by means of an air pressure; and a step in which a diffraction grating is formed on a wafer surface by etching the wafer while using the resist film (304) as a mask.