| 摘要 |
The present invention pertains to a device and method for measuring three-dimensional shapes using the amplitude of a projection grid, and more particularly, a measurement target is irradiated with an image of a projection grid having point of interests in an optical system, an amplitude is obtained by changing a pattern of the projection grid, a magnitude of the amplitude is continuously obtained while moving the measurement target upwards and downwards, and a three-dimensional shape of the measurement target is measured therethrough. The measurement device of the present invention comprises: a pattern projection unit (310) for projecting a pattern on a measurement target having an arbitrary height; an image acquisition unit (320) including an image sensor for acquiring a pattern image projected on the measurement target; a measurement target position determination unit (330) including a position sensor for measuring a moved position by moving the measurement target upwards and downwards; a control unit (340) for receiving the image acquired by the image sensor and a signal of the position signal for measuring a position of the table; and a calculation unit (350) for calculating the height of the measurement target by calculating the image of the image sensor, which is inputted into the control unit, and a position input signal received from the position sensor. |
