发明名称 Semiconductor Die and Method of Forming Sloped Surface in Photoresist Layer to Enhance Flow of Underfill Material Between Semiconductor Die and Substrate
摘要 A semiconductor device has a semiconductor die with composite bump structures over a surface of the semiconductor die. A conductive layer is formed over a substrate. A patterning layer is formed over the substrate. A first portion of the patterning layer is removed to form an opening to expose the substrate and conductive layer. A second portion of the patterning layer is removed to form a sloped surface in the patterning layer extending from a surface of the patterning layer down to the substrate. The sloped surface in the patterning layer can be linear, concave, or convex. The die is mounted to the substrate with the composite bump structures electrically connected to the conductive layer. An underfill material is deposited over the surface of the patterning layer. The sloped surface in the patterning layer aids with the flow of underfill material to cover an area between the die and substrate.
申请公布号 US2013105967(A1) 申请公布日期 2013.05.02
申请号 US201113287006 申请日期 2011.11.01
申请人 LEE JAEHYUN;JANG KIYOUN;STATS CHIPPAC, LTD. 发明人 LEE JAEHYUN;JANG KIYOUN
分类号 H01L23/498;H01L21/50 主分类号 H01L23/498
代理机构 代理人
主权项
地址