PERMANENTLY MAGNETIC, LOW-FREQUENCY, SINGLE-DEGREE-OF-FREEDOM, VIBRATION ISOLATION MECHANISM BASED ON NEGATIVE RIGIDITY PRINCIPLE

摘要

A ring-shaped permanently magnetic, low-frequency, vibration isolation mechanism based on the negative rigidity principle, comprising an upper rubber sheet (1), an inner ring-shaped permanent magnet stationary spindle (2), an upper pressing ring (3) of the upper rubber sheet, an outer pressing ring (4) of the upper rubber sheet, an outer ring-shaped permanent magnet (5), a lower rubber sheet (6), an inner pressing sheet (7) of the lower rubber sheet, an outer pressing ring (8) of the lower rubber sheet, an outer ring-shaped permanent magnet fixing sleeve (9), and an inner ring-shaped permanent magnet (10). The inner ring-shaped permanent magnet (10) is axially magnetized. The outer ring-shaped permanent magnet (5) is radially magnetized. The inner and outer ring-shaped permanent magnets form a positive rigidity system. The upper and lower rubber sheets form a negative rigidity system. The positive and negative rigidity systems are serially connected and used to form the low-frequency vibration isolation mechanism. Three or four single-degree-of-freedom isolation mechanisms can be serially connected to enable three-degrees-of-freedom low-frequency vibration isolation. The present invention can be applied in fields such as optics, acoustics, biology, semiconductor manufacturing, and precision measurement. The present invention is simple in structure, low in cost, easy to process, requires no external air source, and can be used in a vacuum.