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经营范围
发明名称
Positive Photoresist Composition
摘要
<p>식 중, Rf는 탄소수 5 내지 30의 분자쇄 중에 에테르 결합을 1개 이상 포함하는 퍼플루오로알킬기, Q는 폴리에틸렌글리콜 또는 폴리프로필렌글리콜의 단독 중합쇄 또는 이들 양쪽의 공중합쇄를 포함하는 폴리에테르기, R은 수소 원자 또는 탄소수 1 내지 4의 알킬기, X는 산소 원자를 제외한 2가 연결기, Y는 2가 연결기이고, p는 3 이상의 정수이며, n은 0<n<3의 양수이다.</p>
申请公布号
KR101260076(B1)
申请公布日期
2013.05.02
申请号
KR20060126185
申请日期
2006.12.12
申请人
发明人
分类号
G03F7/004;G03F7/022;G03F7/039;G03F7/075
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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