发明名称 |
TEST KEY STRUCTURE AND METHOD FOR MEASURING STEP HEIGHT BY SUCH TEST KEY STRUCTURE |
摘要 |
A test key structure for use in measuring step height includes a substrate, and a pair of test contacts. The substrate includes an isolation region and a diffusion region. The test contact pair includes a first test contact and a second test contact for measuring electrical resistances. The first test contact is disposed on the diffusion region and the second test contact is disposed on the isolation region.
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申请公布号 |
US2013106448(A1) |
申请公布日期 |
2013.05.02 |
申请号 |
US201113286230 |
申请日期 |
2011.11.01 |
申请人 |
KANG CHIH-KAI;CHIH SHU-HSUAN;HSUEH SHENG-YUAN;SUN CHIA-CHEN;HSIEH PO-KUANG;PAI CHI-HORN;HSU SHIH-CHIEH |
发明人 |
KANG CHIH-KAI;CHIH SHU-HSUAN;HSUEH SHENG-YUAN;SUN CHIA-CHEN;HSIEH PO-KUANG;PAI CHI-HORN;HSU SHIH-CHIEH |
分类号 |
G01R27/08;H01L23/48 |
主分类号 |
G01R27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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