| 摘要 |
PURPOSE: An apparatus for loading and unloading a glass substrate is provided to stably load and unload a large area glass substrate to/from a process chamber, and to improve the productivity and the yield of the glass substrate. CONSTITUTION: A chamber body(110) includes a gateway(111) for a glass substrate and an opening for a process chamber. A substrate supporter(120) is hinge-connected to the gateway of the chamber body. The substrate supporter includes a conveyor(123) for moving the glass substrate in both directions of the gateway. A conveyor transport unit(130) receives the glass substrate from the substrate supporter and loads it to an inner part or unloads it from the substrate supporter. A substrate elevating unit(140) loads the glass substrate to the process chamber or unloads.
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