| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of preventing displacement of a wafer. <P>SOLUTION: A semiconductor inspection device includes a wafer holder 3 having a vacuum chuck for fixing a semiconductor wafer, a card board 2 arranged opposite to the wafer holder 3 and having a probe 4, a spacer 5 provided between the wafer holder 3 and the card board 2 so as to surround the semiconductor wafer 6 and the probe 4 for producing a sealed space between the wafer holder 3 and the card board 2, and a decompression unit depressurizing the sealed space for causing the vacuum chuck to suck the semiconductor wafer 6. The semiconductor inspection device comprises control means controlling the decompression unit to maintain a pressure of the sealed space lower than an atmospheric pressure and higher than a pressure of the vacuum chuck. <P>COPYRIGHT: (C)2013,JPO&INPIT |
