| 摘要 |
<P>PROBLEM TO BE SOLVED: To implement a beam structure device capable of reducing variation in a thickness of a flexible beam and a manufacturing method thereof. <P>SOLUTION: A manufacturing method of a beam structure device comprises: a first step of preparing a flexible beam formation substrate 21 having a first surface and a second surface and forming a fixing part 3C and a cavity 21A of a flexible beam on the flexible beam formation substrate 21 by shaving a first surface side of the flexible beam formation substrate 21 in a thickness direction; a second step of preparing a support substrate 2 and fixing the fixing part 3C to the support substrate 2 by joining the flexible beam formation substrate 21 and the support substrate 2 so that the first surface of the flexible beam formation substrate 21 faces the support substrate 2; a third step of thinning the flexible beam formation substrate 21 by shaving the second surface of the flexible beam formation substrate 21; and a fourth step of forming the flexible beam by shaving a second surface side of the flexible beam formation substrate 21 in the thickness direction. In the third step, a supporting column 7 is arranged at a position different from a position at which the flexible beam is formed and between the flexible beam formation substrate 21 and the support substrate 2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
