发明名称 FLUID CONTROL SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To construct a fluid control system 100 capable of distributing flow rates of fluid to secondary flow passages 2 in a simple and compact configuration with a small occupied area. <P>SOLUTION: The fluid control system includes: primary flow passages 1 that extend parallel to a virtual plane; the plurality of secondary flow passages 2 that are configured to cross with the primary flow passages 1 viewed from a virtual plane direction, and configured to be connected to the primary flow passages 1 at the crossing points such that parts of the fluid flowing the primary flow passages 1 flow therein; and fluid resistive elements 3 that are disposed at installation areas 4 set at the crossing points and determine the flow rates of the fluid flowing from the primary flow passages 1 to the secondary flow passages 2. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013080424(A) 申请公布日期 2013.05.02
申请号 JP20110221065 申请日期 2011.10.05
申请人 HORIBA STEC CO LTD 发明人 YASUDA TADAHIRO
分类号 G05D7/06 主分类号 G05D7/06
代理机构 代理人
主权项
地址