发明名称 |
ELECTROSTATIC CHUCK |
摘要 |
<p>Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck for supporting and retaining a substrate having a given width may include a dielectric member having a support surface configured to support a substrate having a given width; an electrode disposed within the dielectric member beneath the support surface and extending from a center of the dielectric member outward to an area beyond an outer periphery of the substrate as defined by the given width of the substrate; an RF power source coupled to the electrode; and a DC power source coupled to the electrode.</p> |
申请公布号 |
WO2013062833(A1) |
申请公布日期 |
2013.05.02 |
申请号 |
WO2012US60682 |
申请日期 |
2012.10.17 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BANNA, SAMER;TODOROW, VALENTIN;LUBOMIRSKY, DMITRY |
分类号 |
H01L21/683;B23Q3/15;H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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