| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus which performs both macro inspection and micro inspection as a single apparatus, achieving footprint saving and reduction in cycle time. <P>SOLUTION: A substrate inspection apparatus 1 of the present invention includes: a substrate mount unit 2 over which a substrate G to be inspected is mounted, and which has a flotation plate 6 for causing the substrate G to be floated by discharging gas from a discharge port 61; a micro inspection unit 3 which performs micro inspection on the substrate G; a substrate transfer unit 4 which transfers the substrate G floated over the substrate mount unit 2; a macro inspection holder 5 which is provided to go up and down with respect to the substrate mount unit 2, and which holds the substrate G floated over the substrate mount unit 2 while allowing the substrate G to be tilted to stand with respect to an upper surface of the substrate mount unit 2; and a macro illumination unit 15 which illuminates a surface of the substrate G held by the macro inspection holder 5. The macro inspection holder 5 rotates about a rotation axis which is parallel to a transfer direction in which the substrate G is transferred by the substrate transfer unit 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
