| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma resistant member excellent in strength and heat conductivity. <P>SOLUTION: A plasma resistant member in one embodiment, which is ceramics having at least two or more phases, includes one or more kinds of oxides selected from among yttrium, zirconium and the third element, wherein each content of yttrium, zirconium and the third element is respectively, in terms of oxides, ≥40 to ≤60 mol%, ≥5 to ≤20 mol% and ≥35 to ≤50 mol%. <P>COPYRIGHT: (C)2013,JPO&INPIT |
