MANUFACTURING METHOD FOR PHOTOVOLTAIC POWER DEVICE AND MANUFACTURING APPARATUS FOR PHOTOVOLTAIC POWER DEVICE

摘要

In order to form a texture structure of inverse pyramid concavities with high speed and accuracy, when a reflection preventing texture is formed on a surface of a photovoltaic power device by laser patterning of an etching resistance film and wet etching, a plurality of laser apertures are machined in a diagonal direction of a square to be a base of the intended pyramid concavity by using a pulse laser and a laser beam splitting means, and a laser aperture pitch between the squares is set to be larger than a pitch on the diagonal.