| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrective information calculating device that can calculate information regarding any positional deviation, even when detection of a corrective pattern involves disturbance, without having to form and detect a pattern for re-correction. <P>SOLUTION: A corrective information calculating device has positional information detecting means 31 that detects information regarding positions of corrective patterns of an image in which a set of a prescribed number of corrective patterns are formed and positional deviation calculating means 32 that calculates information regarding any positional deviation of corrective patterns. The positional information detecting means is provided with threshold setting means 32t that sets a plurality of thresholds for detecting the number of corrective patterns in the corrective pattern set, detects the number of corrective patterns in the corrective pattern set on the basis of the plurality of thresholds, selects the threshold at which a number of corrective patterns equal to the prescribed number are detected, acquires positional information on corrective patterns matching the selected threshold, and calculates information on positional deviations on the basis of the acquired positional information. <P>COPYRIGHT: (C)2013,JPO&INPIT |
