发明名称 STORAGE MATERIAL BASED ON SILICON DOPED BISMUTH-TELLURIUM FOR PHASE-CHANGING STORAGE DEVICES AND PREPARATION METHOD THEREFOR
摘要 <p>Provided in the present invention are a material based on silicon doped bismuth-tellurium for phase-changing storage devices and a preparation method therefor, wherein the material based on silicon doped bismuth-tellurium in the present invention has the chemical general formula of BixTeySi100-(x+y), with x and y being 0<x<=40, 0<y<=60,90<=x+y<100. The inventive material based on silicon doped bismuth-tellurium can be used in phase-changing storage devices because of the feature of reversible switching between a high resistance state and a low resistance state when electrical pulse signals are applied. Compared with conventional phase-changing thin film materials for phase-changing storage devices, such as GeTe, SiSbTe, GeSbTe, the material based on silicon doped bismuth-tellurium of the present invention has a simple composition, a faster phase-changing speed, lower energy required for phase-changing, and good compatibility with the manufacturing process of complementary metal oxide semiconductor (CMOS) devices, and is an excellent new storage material for phase-changing storage devices.</p>
申请公布号 WO2013060034(A1) 申请公布日期 2013.05.02
申请号 WO2011CN81680 申请日期 2011.11.02
申请人 HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY;CHENG, XIAOMIN;JU, CHEN;MIAO, XIANGSHUI 发明人 CHENG, XIAOMIN;MIAO, XIANGSHUI
分类号 H01L45/00;C22C12/00 主分类号 H01L45/00
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