发明名称 SYSTEM AND METHOD FOR ACTIVE VIBRATION DAMPING
摘要 <P>PROBLEM TO BE SOLVED: To provide a practicable damping system that can provide relatively high damping forces while at the same time improving vibration isolation. <P>SOLUTION: In an active vibration damping system having a supporting spring for addressing a static force from a payload, and an independent actively isolated damper positioned in parallel between the payload and a source of vibration, the actively isolated damper includes a small intermediate mass decoupled from the payload mass, and a passive isolator element for dynamic coupling of an isolated platform to the small intermediate mass. The small intermediate mass can damp dynamic forces from the payload. The active damper also includes at least one actuator coupled at one surface to the small intermediate mass and coupled at a second surface to a vibrating base platform. A motion sensor may also be provided so as to generate a feedback signal as a function of the movement of the small intermediate mass. The motion sensor together with a compensation/amplifier module and the actuator act as part of a feedback compensation loop for minimizing vibration. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013080911(A) 申请公布日期 2013.05.02
申请号 JP20120199422 申请日期 2012.09.11
申请人 TECHNICAL MANUFACTURING CORP 发明人 EMIL KRANER
分类号 H01L21/027;F16F15/02;G03F7/20;H01L21/68 主分类号 H01L21/027
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